Hot-wire polysilicon waveguides with low deposition temperature
نویسندگان
چکیده
منابع مشابه
Hot-wire polysilicon waveguides with low deposition temperature.
We fabricated and measured the optical loss of polysilicon waveguides deposited using hot-wire chemical vapor deposition at a temperature of 240°C. A polysilicon film 220 nm thick was deposited on top of a 2000 nm thick plasma-enhanced chemical vapor deposition silicon dioxide layer. The crystalline volume fraction of the polysilicon film was measured by Raman spectroscopy to be 91%. The optica...
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ژورنال
عنوان ژورنال: Optics Letters
سال: 2013
ISSN: 0146-9592,1539-4794
DOI: 10.1364/ol.38.004030